X

Micro and Nano Fabrication: Tools and Processes

Product ID : 36983630


Galleon Product ID 36983630
Model
Manufacturer
Shipping Dimension Unknown Dimensions
I think this is wrong?
-
8,609

*Price and Stocks may change without prior notice
*Packaging of actual item may differ from photo shown

Pay with

About Micro And Nano Fabrication: Tools And Processes

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.