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Chemistry of Atomic Layer Deposition (de Gruyter Textbook)
Product ID : 47269096
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About Chemistry Of Atomic Layer Deposition
Product Description This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface. About the Author Seán Thomas Barry, Carleton University, Ottawa, Canada.
